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Keyence VK-X3000
Controller. VK-X3000. Series: 3D Surface Profiler. Series code: VK-X3000 series
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Description
Controller. VK-X3000. Series: 3D Surface Profiler. Series code: VK-X3000 series
Specification
| Model Name |
Controller |
|---|---|
| Model Code |
VK-X3000 |
| Series Title |
3D Surface Profiler |
| Series Code |
VK-X3000 series |
| Data Sheet URL | |
| Model |
VK-X3000 |
| Type |
Controller |
| Total magnification |
42 to 28800×*1 |
| Field of view |
11 to 7398 μm |
| Measurement principle |
Laser confocal, Focus variation, White light interferometry, Spectral interference |
| Laser wavelength |
VK-X3100: Semiconductor laser, 404 nmVK-X3050: Semiconductor laser, 661 nm |
| Max. laser measurement speed |
Surface: 125 Hz, Line: 7900 Hz*2 |
| Max. laser output |
1.0 mW |
| Laser class |
Class 2 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3) |
| Laser light-receiving element |
16-bit photomultiplier |
| White light source |
White LED |
| White-light-receiving element |
High-definition color CMOS |
| Laser confocal - Height display resolution |
VK-X3100: 0.1 nmVK-X3050: 1 nm |
| Laser confocal - Height repeatability σ |
VK-X3100: 10×: 100 nm, 20×: 40 nm, 50×: 12 nmVK-X3050: 10×: 100 nm, 20×: 40 nm, 50×: 20 nm |
| Laser confocal - Height accuracy |
0.2+L/ 100 μm or less*4 |
| Laser confocal - Width display resolution |
VK-X3100: 0.1 nmVK-X3050: 1 nm |
| Laser confocal - Width repeatability 3σ |
VK-X3100: 10×: 200 nm, 20×: 100 nm, 50×: 40 nmVK-X3050: 10×: 400 nm, 20×: 100 nm, 50×: 50 nm |
| Laser confocal - Width accuracy |
Measured value ±2% or less*4 |
| Focus variation - Height display resolution |
VK-X3100: 0.1 nmVK-X3050: 1 nm |
| Focus variation - Height repeatability σ |
VK-X3100: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nmVK-X3050: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 30 nm |
| Focus variation - Height accuracy |
0.2+L/ 100 μm or less*4 |
| Focus variation - Width display resolution |
VK-X3100: 0.1 nmVK-X3050: 1 nm |
| Focus variation - Width repeatability 3σ |
VK-X3100: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nmVK-X3050: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 65 nm |
| Focus variation - Width accuracy |
Measured value ±2% or less*4 |
| White light interferometry - Height display resolution |
0.01 nm |
| White light interferometry - Width display resolution |
0.1 nm |
| White light interferometry - Surface topography repeatability |
0.08 nm*5 |
| White light interferometry - Repeatability of RMS |
0.008 nm*5 |
| Spectral interference film thickness measurement - Repeatability σ |
0.1 nm*5 |
| Spectral interference film thickness measurement - Accuracy |
±0.6%*5 |
| Optical observation - Number of pixels |
5.6 million |
| Optical observation - Revolver |
6-hole electric revolver |
| Optical observation - Ring illumination lens |
2.5×, 5×, 10× |
| Optical observation - Optical zoom |
1 to 8× |
| XY stage configuration - Manual operation range |
70 × 70 mm 2.76” × 2.76” |
| XY stage configuration - Motorized operation range |
100 × 100 mm 3.94” × 3.94” |
| Power supply - Power voltage |
100 to 240 VAC, 50/60 Hz |
| Power supply - Power consumption |
150 VA |
| Environmental resistance - Ambient temperature |
+15 to 28°C 59 to 82.4°F |
| Environmental resistance - Relative humidity |
20 to 80% RH (No condensation) |
| Weight |
Approx. 3 kg |
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