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Keyence SI-F80R
Sensor Head, Wafer Thickness Measurement Type. SI-F80R. Series: Spectral-Interference Wafer Thickness Meter. Series code: SI-F80R series
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Description
Sensor Head, Wafer Thickness Measurement Type. SI-F80R. Series: Spectral-Interference Wafer Thickness Meter. Series code: SI-F80R series
Specification
| Model Name | Sensor Head, Wafer Thickness Measurement Type |
|---|---|
| Model Code | SI-F80R |
| Series Title | Spectral-Interference Wafer Thickness Meter |
| Series Code | SI-F80R series |
| Data Sheet URL | https://www.keyence.com/download/download/confirmation/?dlSeriesId=WS_SR49623&dlModelId=PM_216F80R&dlSiteId=1&dlLanguageId=en-US&dlLangType=en-US |
| CAD URL | https://www.keyence.com/products/measure/spectral/si-f80r/downloads/?mode=cd&modelId=PM_216F80R |
| Model | SI-F80R*1 |
| Type | Wafer thickness measurement type Sensor head |
| Measurement range | 10 to 310 µm 0.000394″ to 0.0122″ (when n=3.5)*2 |
| Possible detection distance | 80 to 81.1 mm 3.15″ to 3.19″ |
| Light source | Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3) |
| Spot diameter | ø25 µm ø0.000984″*4 |
| Linearity | ±0.1 µm ±0.000004″ (when n=3.5)*5 |
| Resolution | 0.001 µm *6 |
| Sampling cycle | 200 µs |
| LED display | Target near center of measurement range : green lights. Target within measurement range : orange lights.Target outside measurement range : flashes orange. |
| Temperature fluctuation | ― |
| Environmental resistance - Enclosure rating | IP64 |
| Environmental resistance - Ambient light | Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
| Environmental resistance - Ambient temperature | 0 to +50 °C 32 to 122 °F |
| Environmental resistance - Relative humidity | 35 to 85 % RH (No condensation) |
| Environmental resistance - Vibration resistance | 10 to 55 Hz, Double amplitude 1.5 mm 0.06″, 2 hours in each of the X, Y, and Z directions |
| Material | SUS |
| Weight | Approx. 70 g (including cable) |
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