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Keyence SI-F80R
Sensor Head, Wafer Thickness Measurement Type. SI-F80R. Series: Spectral-Interference Wafer Thickness Meter. Series code: SI-F80R series
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Description
Sensor Head, Wafer Thickness Measurement Type. SI-F80R. Series: Spectral-Interference Wafer Thickness Meter. Series code: SI-F80R series
Specification
| Model Name |
Sensor Head, Wafer Thickness Measurement Type |
|---|---|
| Model Code |
SI-F80R |
| Series Title |
Spectral-Interference Wafer Thickness Meter |
| Series Code |
SI-F80R series |
| Data Sheet URL | |
| CAD URL |
https://www.keyence.com/products/measure/spectral/si-f80r/downloads/?mode=cd&modelId=PM_216F80R |
| Model |
SI-F80R*1 |
| Type |
Wafer thickness measurement type Sensor head |
| Measurement range |
10 to 310 µm 0.000394" to 0.0122" (when n=3.5)*2 |
| Possible detection distance |
80 to 81.1 mm 3.15" to 3.19" |
| Light source |
Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3) |
| Spot diameter |
ø25 µm ø0.000984"*4 |
| Linearity |
±0.1 µm ±0.000004" (when n=3.5)*5 |
| Resolution |
0.001 µm *6 |
| Sampling cycle |
200 µs |
| LED display |
Target near center of measurement range : green lights. Target within measurement range : orange lights.Target outside measurement range : flashes orange. |
| Temperature fluctuation |
― |
| Environmental resistance - Enclosure rating |
IP64 |
| Environmental resistance - Ambient light |
Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
| Environmental resistance - Ambient temperature |
0 to +50 °C 32 to 122 °F |
| Environmental resistance - Relative humidity |
35 to 85 % RH (No condensation) |
| Environmental resistance - Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
| Material |
SUS |
| Weight |
Approx. 70 g (including cable) |
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