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Keyence VR-6200
3D Optical Profilometer Head (Fully-automated model). VR-6200. Series: 3D Optical Profilometer. Series code: VR-6000 series
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Description
3D Optical Profilometer Head (Fully-automated model). VR-6200. Series: 3D Optical Profilometer. Series code: VR-6000 series
Specification
| Model Name | 3D Optical Profilometer Head (Fully-automated model) |
|---|---|
| Model Code | VR-6200 |
| Series Title | 3D Optical Profilometer |
| Series Code | VR-6000 series |
| Data Sheet URL | https://www.keyence.com/download/download/confirmation/?dlSeriesId=WS_157128&dlModelId=PM_2506200&dlSiteId=1&dlLanguageId=en-US&dlLangType=en-US |
| Model | VR-6200 |
| Type | Head |
| Operating System | Windows 10 Professional / Windows 11 Professional |
| Controller | VR-6000 |
| Field of view - Low magnification (wide field of view) | 24.0 mm 0.94″ |
| Field of view | 18.0 mm 0.71″ |
| Field of view - High magnification (high resolution) | 7.6 mm 0.30″ |
| Zoom | 1× to 4× |
| Height measurement - Display resolution | 0.1 μm |
| Height measurement - Height measurement range | Low magnification (wide field of view): 10 mm 0.39″High magnification (high resolution): 1 mm 0.04″ |
| Height measurement | Low magnification (wide field of view): 50 mm 1.97″High magnification (high resolution): 30 mm 1.18″ |
| Height measurement - Repeatability (σ) | 0.4 μm *1 |
| Height measurement - Measurement accuracy | ±2.5 μm *1 |
| Width measurement - Repeatability (σ) | Low magnification (wide field of view): 1 μmHigh magnification (high resolution): 0.5 μm*1 |
| Width measurement - Measurement accuracy | Low magnification (wide field of view): ±5 μmHigh magnification (high resolution): ±2 μm*1 |
| Stitching function | Fully-automated measurement (XY automatic control + Z automatic control, θ automatic control), Automatic mapping creation, Automatic area setting *2 |
| XY measurable range | 300 × 150 mm 11.81″ × 5.91″ *2 |
| Stage - XY stroke | 278 × 134 mm 10.94″ × 5.28″ (motorized) |
| Stage - Z stroke | 69 mm 2.72″ (motorized) |
| Stage - Load capacity | 4.5 kg 9.92 lb |
| Working distance | 75 mm 2.95″ |
| Image receiving element | 4 megapixel monochrome CMOS |
| Transmitter lens | Double-telecentric lens × 2 |
| Receiver lens | Double-telecentric lens |
| Light sources - Observation light source | LED ring light (red, blue, green) |
| Light sources - Measurement light source | White LED |
| Data processing | Dedicated PC specified by KEYENCE |
| Power supply - Power voltage | 100 to 240 VAC ±10%, 50/60 Hz |
| Power supply - Power consumption | 200 VA max. |
| Environmental resistance - Ambient temperature | +15 to 30°C +59 to 86°F |
| Environmental resistance - Relative humidity | 20 to 80% RH (no condensation) |
| Weight | Approx. 28 kg 61.73 lb *3 |
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