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Keyence VR-6100
3D Optical Profilometer Head (Standard model). VR-6100. Series: 3D Optical Profilometer. Series code: VR-6000 series
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Description
3D Optical Profilometer Head (Standard model). VR-6100. Series: 3D Optical Profilometer. Series code: VR-6000 series
Specification
| Model Name |
3D Optical Profilometer Head (Standard model) |
|---|---|
| Model Code |
VR-6100 |
| Series Title |
3D Optical Profilometer |
| Series Code |
VR-6000 series |
| Data Sheet URL | |
| Model |
VR-6100 |
| Type |
Head |
| Operating System |
Windows 10 Professional / Windows 11 Professional |
| Controller |
VR-6000 |
| Field of view - Low magnification (wide field of view) |
24.0 mm 0.94" |
| Field of view |
18.0 mm 0.71" |
| Field of view - High magnification (high resolution) |
7.6 mm 0.30" |
| Zoom |
1× to 4× |
| Height measurement - Display resolution |
0.1 μm |
| Height measurement - Height measurement range |
Low magnification (wide field of view): 10 mm 0.39"High magnification (high resolution): 1 mm 0.04" |
| Height measurement |
Low magnification (wide field of view): 50 mm 1.97"High magnification (high resolution): 30 mm 1.18" |
| Height measurement - Repeatability (σ) |
0.4 μm *1 |
| Height measurement - Measurement accuracy |
±2.5 μm *1 |
| Width measurement - Repeatability (σ) |
Low magnification (wide field of view): 1 μmHigh magnification (high resolution): 0.5 μm*1 |
| Width measurement - Measurement accuracy |
Low magnification (wide field of view): ±5 μmHigh magnification (high resolution): ±2 μm*1 |
| Stitching function |
Manual measurement (XY manual operation + Z automatic control) *2 |
| XY measurable range |
92 × 86 mm 3.62" × 3.39" *2 |
| Stage - XY stroke |
70 × 70 mm 2.76" × 2.76" (manual) |
| Stage - Z stroke |
69 mm 2.72" (motorized) |
| Stage - Load capacity |
4.5 kg 9.92 lb |
| Working distance |
75 mm 2.95" |
| Image receiving element |
4 megapixel monochrome CMOS |
| Transmitter lens |
Double-telecentric lens × 2 |
| Receiver lens |
Double-telecentric lens |
| Light sources - Observation light source |
LED ring light (red, blue, green) |
| Light sources - Measurement light source |
White LED |
| Data processing |
Dedicated PC specified by KEYENCE |
| Power supply - Power voltage |
100 to 240 VAC ±10%, 50/60 Hz |
| Power supply - Power consumption |
200 VA max. |
| Environmental resistance - Ambient temperature |
+15 to 30°C +59 to 86°F |
| Environmental resistance - Relative humidity |
20 to 80% RH (no condensation) |
| Weight |
Approx. 25 kg 55.12 lb *3 |
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